| Trazar
automatic impedance matching circuit is the one designed
for the meter being demanded for the operativeness it
is accurate and with reliability to minimize rest time
to have secured the best condition for a semiconductor,
a plane display, a lead circuit, and various analyses.
Trazar (Torezar) model AMU2-1 has it convert into the
load resistance of and other frequencies constant 50ohm
..impedance combined plasma in the generation.. 13.56Hz.
AMU2-1 is effective and assumes flexibility to be the
economical one most for various usages by operativeness
without RF (frequency) wide-ranging source (To 25W-5,000W)
that has flexibility and an extra procedure, the operation,
and the adjustment. |
|
|
The setting and the
operation are prompt, there is reliability, and easiness.
An accurate tune condition is found quickly within
the range decided by Sarpocontororlshistem of the AMU2-1
adjustment circuit and automatically. A quick, efficient,
accurate setting is done without the operator's interference
by the tuning completely automated. Additionally,
this device can supplement non-ion ionizing processing
box “un-ionized process chamber" (state “no glow conditiou"
that Grou is not discharged), cancels the influence
on the process by an increase of momentary RF in the
range of the adjustment, and doesn't need the correction
of the process condition. Driving with reliability
will be accurate compared with a wide-ranging process
condition and be offered during many years made of Trazar
AMU2-1.
It corresponds to your
specification.
Only Trazar Co. , RF impedance matching contains the
focus. The Ortotac adjustment unit (AMU series) simplified
to our limit limits to the design that integrates with
original customer's circuit form, and answers customer's
specification related to a lot of main semiconductors
besides Novellas and Mattson Technology.
AMU10D 
|
AMU10E 
|
|
